Low-power hermetically sealed on-chip plasma light source micromachined in glassReport as inadecuate




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Presented at: 21st IEEE International Conference on Micro Electro Mechanical Systems, 2008, Tuscon, AZ, 13-17 Jan. 2008 Publication date: 2008

We report on the fabrication and testing of a chip-scale plasma light source. The device consists of a stack of three anodically bonded Pyrex wafers, which hermetically enclose a gas-filled cavity in which electrodes are used to ignite a low power (≪500 mW) RF plasma.

Reference LMTS-CONF-2008-001





Author: Carazzetti, R.; Renaud, Ph.; Shea, H. R.

Source: https://infoscience.epfl.ch/record/116992?ln=en







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