A HYDRODYNAMICAL STUDY OF THE INSTABILITY OF A PLANAR LIQUID METAL ION SOURCE SUMMARYReport as inadecuate




A HYDRODYNAMICAL STUDY OF THE INSTABILITY OF A PLANAR LIQUID METAL ION SOURCE SUMMARY - Download this document for free, or read online. Document in PDF available to download.



Abstract : Liquid metal ion sources LMIS are of interest in diverse areas of technology since they provide a high brightness, quasi-point source of ions for high resolution ion beam lithography, microfabrication, surface analysis and other potential applicationsl. The technical difficulties of building and operating stable sources have been largely overcome. The basic physics of source operation and ion formation is, however, still incompletely understood. Krohn and Ringo first described the fundamental processes of ion emission from liquid metal tips in a strong electric field2. Subsequently, Gomer3 and others4-8 analyzed the mechanism of LMIS and developed theoretical models to explain the shape and size of the ion emitting region.





Author: N. Miskovsky J. He P. Cutler M. Chung

Source: https://hal.archives-ouvertes.fr/



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