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Abstract: In this work, a 3-D simulation is performed to study for the solid-fluidcoupling effect driven by piezoelectric materials and utilizes asymmetricobstacles to control the flow direction. The result of simulation is alsoverified. For a micropump, it is crucial to find the optimal working frequencywhich produce maximum net flow rate. The PZT plate vibrates under the firstmode, which is symmetric. Adjusting the working frequency, the maximum flowrate can be obtained. For the micrpump we studied, the optimal workingfrequency is 3.2K Hz. At higher working frequency, say 20K Hz, the fluid-solidmembrane may come out a intermediate mode, which is different from the firstmode and the second mode. It is observed that the center of the mode drifts.Meanwhile, the result shows that a phase shift lagging when the excitationforce exists in the vibration response. Finally, at even higher workingfrequency, say 30K Hz, a second vibration mode is observed.



Author: W.P. Lan, J.S. Chang, K.C. Wu, Y.C. Shih

Source: https://arxiv.org/







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