Fabrication and Characterization of Large Area Metallic Nano-Split-Ring Arrays by Nanoimprint Lithography - Physics > OpticsReport as inadecuate




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Abstract: This paper presents a novel method to parallel fabricate large area waferscale metallic nano-split-ring arrays with nanoimprint lithography NIL. Toour knowledge it is the first method that can pattern large area and high densemetallic split-ring arrays with advantages of high throughput, low-cost andsimplicity. This method makes metallic nano-split-ring arrays, which wassomehow conceptual before, practically useful. The optical properties of thefabricated gold nano-split-ring arrays with different parameters were measured.They show very obvious magnetic response to the incident light which shows10dB extinction ration in transmission spectra. The structure fabricated bythis method can generate magnetic response in optical range with relativelylarge feature size that relax the requirement of resolution on lithography.



Author: Can Peng, Shufeng Bai, Stephen Y. Chou

Source: https://arxiv.org/







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