NEW COMPOUNDS OBTAINED BY LPCVD IN THE B-C-N CHEMICAL SYSTEMReport as inadecuate




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Abstract : The composition and some physical properties of boron-carbon- nitrogen solid solutions prepared by chemical vapor deposition CVD have been investigated. Crystalline and amorphous films resulting from heterogeneous nucleation were characterized by X-ray diffraction, XPS, RBS and TEM. The compositions of these single-phase materials are concentrated in two domains located in the B-N>1 part of the B-C-N composition diagram. The carbon-rich domain corresponds to an ideal C5B2N composition with various structural defects. The thermal stability behavior of these films is characterized by the absence of any mass loss after 1 hour at 1700°C while graphitization and formation of small amounts of B13C2 are observed. Density and electrical conductivity measurements were also performed.





Author: F. Saugnac F. Teyssandier A. Marchand

Source: https://hal.archives-ouvertes.fr/



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