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The mechanical response ofshock-loaded microelectromechanical systems MEMS is simulated to formulate guidelinesfor the design of dynamically reliable MEMS. MEMS are modeled as microstructuressupported on elastic substrates, and the shock loads are represented as pulsesof acceleration applied by the package on the substrate over a finite timeduration. For typical MEMS and shock loads, the response of the substrate isclosely approximated by rigid-body motion. Results indicate that modeling the shockforce as a quasi-static force for MEMS with low-natural frequencies may lead toerroneous results. A criterion is obtained to distinguish between the dynamic andquasi-static responses of the MEMS.


Microelectromechanical Systems MEMS, Shock, Reliability

Cite this paper

Lu, Y. , Cheng, Y. and Sun, Y. 2014 Numerical Simulation of Shock Resistant Microsystems MEMS. Modern Mechanical Engineering, 4, 119-124. doi: 10.4236-mme.2014.43011.

Author: Yubin Lu, Yongsheng Cheng, Yuancheng Sun



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