Influence of Oxygen to Argon Ratio on the Structural and Morphological Properties of Nb-Doped SrTiO3 Epitaxial Films Grown by Reactive Ion Beam Sputter DepositionReport as inadecuate




Influence of Oxygen to Argon Ratio on the Structural and Morphological Properties of Nb-Doped SrTiO3 Epitaxial Films Grown by Reactive Ion Beam Sputter Deposition - Download this document for free, or read online. Document in PDF available to download.

Nb-doped SrTiO3 STNO films were grown on 001-oriented LaAlO3 substrates by a reactive ion beam sputter deposition at various mixing ratios OMRs with a substrate temperature of 800oC. The STNO films exhibited good crystallinity with an epitaxial orientation as characterized by high-resolution X-ray diffraction, grazing-incidence X-ray diffraction, and in-plane pole figure analysis. A decrease of out-of-plane and in-plane lattice constants was observed with an increase of OMR. The surface morphology of the STNO films showed a very dense fine-grain structure. The root-mean-square roughness was found to be increased as the OMR increased. Moreover, the elemental compositions of the STNO films were examined by X-ray photoelectron spectroscopy.

KEYWORDS

Nb-Doped SrTiO3; Epitaxial Films; Crystal Structure; Ion Beam Sputter Deposition

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G. Panomsuwan and N. Saito -Influence of Oxygen to Argon Ratio on the Structural and Morphological Properties of Nb-Doped SrTiO3 Epitaxial Films Grown by Reactive Ion Beam Sputter Deposition,- Crystal Structure Theory and Applications, Vol. 2 No. 1, 2013, pp. 34-38. doi: 10.4236-csta.2013.21005.





Author: Gasidit Panomsuwan, Nagahiro Saito

Source: http://www.scirp.org/



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