A Nanopore Structured High Performance Toluene Gas Sensor Made by Nanoimprinting MethodReport as inadecuate




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1

Department of Nano Science and Engineering, Myongji University, Gyeonggi 449-728, Korea

2

Department of Chemical Engineering, Myongji University, Gyeonggi 449-728, Korea

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Department of Electrical Engineering, Myongji University, Gyeonggi 449-728, Korea





*

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Abstract Toluene gas was successfully measured at room temperature using a device microfabricated by a nanoimprinting method. A highly uniform nanoporous thin film was produced with a dense array of titania TiO2 pores with a diameter of 70~80 nm using this method. This thin film had a Pd-TiO2 nanoporous-SiO2-Si MIS layered structure with Pd-TiO2 as the catalytic sensing layer. The nanoimprinting method was useful in expanding the TiO2 surface area by about 30%, as confirmed using AFM and SEM imaging. The measured toluene concentrations ranged from 50 ppm to 200 ppm. The toluene was easily detected by changing the Pd-TiO2 interface work function, resulting in a change in the I-V characteristics. View Full-Text

Keywords: toluene; gas sensor; MIS structure; nanoimprinting method; titania; nanopore toluene; gas sensor; MIS structure; nanoimprinting method; titania; nanopore





Author: Kwang-Su Kim 1, Woon-Hyuk Baek 1, Jung-Min Kim 1, Tae-Sik Yoon 1, Hyun Ho Lee 2, Chi Jung Kang 1 and Yong-Sang Kim 1,3,*

Source: http://mdpi.com/



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