A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active SensorReport as inadecuate




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1

Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon, Seoul 139-701, Korea

2

Korea Institute of Science and Technology KIST, Seoul 136-791, Korea

3

Department of Chemical Engineering, Kangwon National University, Chuncheon 200-701, Korea



These authors contributed equally to this work.





*

Authors to whom correspondence should be addressed.



Abstract The ability to measure pressure and force is essential in biomedical applications such as minimally invasive surgery MIS and palpation for detecting cancer cysts. Here, we report a force sensor for measuring a shear and normal force by combining an arrayed piezoelectric sensors layer with a precut glass top plate connected by four stress concentrating legs. We designed and fabricated a thin film piezoelectric force sensor and proposed an enhanced sensing tool to be used for analyzing gentle touches without the external voltage source used in FET sensors. Both the linear sensor response from 3 kPa to 30 kPa and the exact signal responses from the moving direction illustrate the strong feasibility of the described thin film miniaturized piezoelectric force sensor. View Full-Text

Keywords: force sensor; tactile sensor; piezoelectric; thin film; MEMS force sensor; tactile sensor; piezoelectric; thin film; MEMS





Author: Junwoo Lee 1, Wook Choi 1, Yong Kyoung Yoo 1, Kyo Seon Hwang 2, Sang-Myung Lee 3, Sungchul Kang 2, Jinseok Kim 2,†,* and Jeong Hoon Lee 1,†,*

Source: http://mdpi.com/



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