Mass Sensitivity Optimization of a Surface Acoustic Wave Sensor Incorporating a Resonator ConfigurationReport as inadecuate




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Institute of Acoustics, Chinese Academy of Sciences, No.21, North 4th Ring West Road, Beijing 100190, China





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Academic Editor: Vittorio M. N. Passaro

Abstract The effect of the sensitive area of the two-port resonator configuration on the mass sensitivity of a Rayleigh surface acoustic wave R-SAW sensor was investigated theoretically, and verified in experiments. A theoretical model utilizing a 3-dimensional finite element method FEM approach was established to extract the coupling-of-modes COM parameters in the absence and presence of mass loading covering the electrode structures. The COM model was used to simulate the frequency response of an R-SAW resonator by a P-matrix cascading technique. Cascading the P-matrixes of unloaded areas with mass loaded areas, the sensitivity for different sensitive areas was obtained by analyzing the frequency shift. The performance of the sensitivity analysis was confirmed by the measured responses from the silicon dioxide SiO2 deposited on different sensitive areas of R-SAW resonators. It is shown that the mass sensitivity varies strongly for different sensitive areas, and the optimal sensitive area lies towards the center of the device. View Full-Text

Keywords: mass sensitivity; Rayleigh surface acoustic wave R-SAW resonator; finite element method FEM; coupling-of-modes COM; sensitive areas mass sensitivity; Rayleigh surface acoustic wave R-SAW resonator; finite element method FEM; coupling-of-modes COM; sensitive areas





Author: Wenchang Hao, Jiuling Liu * , Minghua Liu, Yong Liang and Shitang He

Source: http://mdpi.com/



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