Micromachined Shape-Memory-Alloy Microactuators and Their Application in Biomedical DevicesReport as inadecuate




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1

Faculty of Electrical Engineering, Universiti Teknologi Malaysia, 81310 Skudai, Johor, Malaysia

2

Flextronics, Pelabuhan Tanjung Pelepas PTP, 81560 Gelang Patah, Johor, Malaysia





*

Author to whom correspondence should be addressed.



Academic Editor: Miko Elwenspoek

Abstract Shape memory alloys SMAs are a class of smart materials characterized by shape memory effect and pseudo-elastic behavior. They have the capability to retain their original form when subjected to certain stimuli, such as heat or a magnetic field. These unique properties have attracted many researchers to seek their application in various fields including transportation, aerospace, and biomedical. The ease process adaption from semiconductor manufacturing technology provides many opportunities for designing micro-scale devices using this material. This paper gives an overview of the fabrication and manufacturing technique of thin-film and bulk micromachined SMAs. Key features such as material properties, transformation temperature, material composition, and actuation method are also presented. The application and micromechanism for both thin-film and bulk SMA are described. Finally, the microactuator devices emphasized for biomedical applications such as microgrippers and micropumps are highlighted. The presented review will provide information for researchers who are actively working on the development of SMA-based microscale biomedical devices. View Full-Text

Keywords: thin-film shape memory alloy; bulk shape memory alloy; microactuator; micropump; biomedical thin-film shape memory alloy; bulk shape memory alloy; microactuator; micropump; biomedical





Author: Mohammad Amri Zainal 1, Shafishuhaza Sahlan 1 and Mohamed Sultan Mohamed Ali 1,2,*

Source: http://mdpi.com/



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