Three-dimensional high-resolution quantitative microscopy of extended crystalsReport as inadecuate

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* Corresponding author 1 COMiX - Coherent Optical Microscopy and X-rays FRESNEL - Institut FRESNEL 2 ESRF - European Synchrotron Radiation Facility 3 CEA-D R F M C ESRF - European Synchrotron Radiation Facility, CEA-LETI - Laboratoire d-Electronique et des Technologies de l-Information 4 Institute of Semiconductor and Solid State Physics 5 SOITEC

Abstract : Hard X-ray lens-less microscopy raises hopes for a non-invasive quantitative imaging, capableof achieving the extreme resolving power demands of nanoscience. However, a limit imposedby the partial coherence of third generation synchrotron sources restricts the sample size tothe micrometer range. Recently, X-ray ptychography has been demonstrated as a solution forarbitrarily extending the fi eld of view without degrading the resolution. Here we show thatptychography, applied in the Bragg geometry, opens new perspectives for crystalline imaging.The spatial dependence of the three-dimensional Bragg peak intensity is mapped and the entiredata subsequently inverted with a Bragg-adapted phase retrieval ptychographical algorithm.We report on the image obtained from an extended crystalline sample, nanostructured froma silicon-on-insulator substrate. The possibility to retrieve, without transverse size restriction,the highly resolved three-dimensional density and displacement fi eld will allow for theunprecedented investigation of a wide variety of crystalline materials, ranging from life scienceto microelectronics.

Author: Pierre Godard - G. Carbone - Marc Allain - Francesca Mastropietro - G. Chen - L. Capello - A. Diaz - T.H. Metzger - J. Stangl - V



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