Tuning the Bias Sensing Layer: A New Way to Greatly Improve Metal-Oxide Gas Sensors SelectivityReport as inadecuate




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1 LAAS-MICA - Équipe MICrosystèmes d-Analyse LAAS - Laboratoire d-analyse et d-architecture des systèmes Toulouse 2 LAAS-I2C - Service Instrumentation Conception Caractérisation LAAS - Laboratoire d-analyse et d-architecture des systèmes Toulouse 3 LAAS-IDEA - Service Informatique : Développement, Exploitation et Assistance LAAS - Laboratoire d-analyse et d-architecture des systèmes Toulouse 4 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Abstract : The effects of bias current in the sensing layer of resistive Metal-Oxide MOX sensors toward gases have been investigated. The behavior of a WO3 thin film deposited by sputtering has been studied. In a first time, while the working temperature is kept constant, it has been found that tuning the polarization of the MOX layer induces changes on its sensitivity. Besides, the behavior of sensitivity versus bias current depends on the nature of the gas. For example, the response to NH3-10ppm hugely increases with the bias rise; at the opposite, the polarization has no effect on NO2-10ppm responses. In a second time, the effect of the working temperature changing added to the polarization has been studied. Thus, an optimized temperature-modulated profile has been established and it has been associated with a multivariate analysis in order to quickly and easily discriminate several gases and mixtures. It has been shown this method allows discriminating two gases NH3 and NO2 at two concentrations 5 and 10 ppm alone and mixed. These results open a new way to increase the selectivity of MOX sensors.

Keywords : Gas Senso Metal Oxide Temperature-modulated Bias-modulated





Author: Nicolas Dufour - Audrey Chapelle - Chabane Talhi - Frédéric Blanc - Bernard Franc - Philippe Menini - Khalifa Aguir -

Source: https://hal.archives-ouvertes.fr/



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