High-efficiency subwavelength diffractive element patterned in a high-refractive-index material for 633 nmReport as inadecuate




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1 Laboratoire Charles Fabry de l-Institut d-Optique - Naphel LCFIO - Laboratoire Charles Fabry de l-Institut d-Optique 2 Laboratoire Charles Fabry de l-Institut d-Optique - Scop LCFIO - Laboratoire Charles Fabry de l-Institut d-Optique 3 L2M - Laboratoire de Microstructures et de Microélectronique

Abstract : We propose the use of high-index materials for the fabrication of subwavelength diffractive components operating in the visible domain. This approach yields a reduction of fabrication constraints and an improvement of theoretical performance. A blazed grating with subwavelength binary features and with a period of 5.75 wavelengths is designed and fabricated in a TiO2 layer coated upon a glass substrate. The first-order diffraction efficiency measured with a He-Ne laser beam is 83%, which is slightly larger than that achieved theoretically by the best standard continuous profile blazed grating fabricated in glass with the same period.





Author: Simion Astilean - Philippe Lalanne - Pierre Chavel - Edmond Cambril - Huguette Launois -

Source: https://hal.archives-ouvertes.fr/



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