Fabrication of Uniform Photonic Devices Using 193nm Optical Lithography in Silicon-on-InsulatorReport as inadecuate




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(2008)14th European Conference on Integrated Optics.p.359-362 Mark

Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-426358



Author: shankar kumar Selvaraja , Wim Bogaerts , Dries Van Thourhout and Roel Baets

Source: https://biblio.ugent.be/publication/426358



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